Class 350 Clean Room

Class 350 Clean Room

Clean Room Facility for Semiconductor Processing and Device Fabrication

Clean Room Facility for Semiconductor Processing and Device FabricationThe Departments of Physics and Astronomy and Electronic Engineering maintain a semiconductor processing facility, which is available to research groups in the university and also by arrangement to outside organisations. For further information contact Dr. Susan Law

This clean room facility meets Class 350 (American Class 10,000 or ISO Class 7) requirements for semiconductor processing and device fabrication. The room is sealed, air entering the clean room through High Efficiency Particulate Air ( HEPA ) filters, and is maintained at 40Pa above ambient pressure. The room contains essential fabrication and testing equipment while air compressors, water purifiers, and gas supplies are located outside the clean room.

Clean Room Facility for Semiconductor Processing and Device Fabrication

Facilities are available for processing photoresist, spincoating materials, depositing metals, etching (chemically & plasma) and analysing the results (profiler, microscope and film thickness measurements).

A laboratory-specific induction is required for access. All basic University staff inductions should have been completed followed by a HAZMAT training session with the University’s Chemical Safety Officer, Jenny Minard (x8169). Users should then print a copy of the Users’ Manual and read it, paying particular attention to safety aspects. They should then complete the quiz at the end and make an appointment to see Dr. Susan Law for an introductory tour of the laboratory. Training for specific equipment is provided by experienced users.

The clean room operating costs are not funded by the department. The funds required to maintain it and it’s services are collected from the users on a pro-rata basis at the end of the year. The more users, the cheaper it gets.

Contact numbers

Clean Room: 9850 7753
Outer Room: 9850 7751


Users must obtain a copy of the SDS and complete a Hazardous Substance Risk assessment for every hazardous chemical to be used.

Hazardous Substance Declaration is to be filled in prior to ordering ANY chemical, hazardous or not.

To check whether a chemical is already in use in the laboratory, check in the laboratory’s yellow SDS folder. If it is not already in use, you must supply a copy of the SDS to the laboratory manager, preferably in digital form.
Software (see Dr. David Inglis):

Tanner EDA design tools including L-Edit for Mask layout

COMSOL Multiphysics, finite element analysis package (formerly FEMLAB)

  1. Change room
  2. Tencor profilometer
  3. Vacuum deposition system
  4. Wet chemical bench
  5. Millipore ultra-pure water system
  6. Hotplates
  7. Laurell spin processor
  8. Karl Suss MJB3 mask aligner
  9. Plasma etcher
  10. Laboratory oven
  11. Polyvar microscope
  12. Filmetrics thin film measurement system
  13. Gas and compressed air supplies
  14. Bulk chemical storage

Inglis uFlow

Microfluidic devices fabricated         by David Inglis in the clean room facility.

Microfluidic devices fabricated by David Inglis in the clean room facility.

Back to the top of this page